Piezoelectric thin film element
AssigneeMurata Manufacturing Co., Ltd.
InventorHiroshi Shiraki
Life of this patent
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Abstract
A piezoelectric thin film element that includes a substrate, a lower electrode on the substrate, a piezoelectric film on the lower electrode, and an upper electrode on the piezoelectric film. The piezoelectric film is a potassium sodium niobate film represented, as its main constituent, by the general formula (1−n)(K1-xNax)NbyO3-nM1M2O3 in which M1 is any one of Ca, Sr, and Ba, and M2 is Zr, and x, y, and n respectively are within the ranges of: 0.25≦x≦1.00; 0.85≦y≦1.10; and 0.01≦n≦0.10. Alternatively, M2 is any one of Sn and Hf, and x, y, and n respectively are within the ranges of: 0.25≦x≦1.00; 0.90≦y≦1.05; and 0.01≦n≦0.10.
Claims18
A piezoelectric thin film element comprising:
- an electrode;
- and
- a piezoelectric film adjacent the electrode,
- wherein the piezoelectric film is a potassium sodium niobate film containing the general formula (1−n)(K1-xNax)NbyO3-nBaZrO3 as its main constituent, and x, y, and n respectively are within the ranges of:
- 0.25≦x≦0.75;
- 0.85≦y≦1.10;
- and 0.01≦n≦0.10.
A piezoelectric thin film element comprising:
- an electrode;
- and
- a piezoelectric film adjacent the electrode,
- wherein the piezoelectric film is a potassium sodium niobate film containing the general formula (1−n)(K1-xNax)NbyO3-nBaSnO3 as its main constituent, and x, y, and n respectively are within the ranges of:
- 0.25≦x≦0.75;
- 0.90≦y≦1.05;
- and 0.01≦n≦0.10.
A piezoelectric thin film element comprising:
- an electrode;
- and
- a piezoelectric film adjacent the electrode,
- wherein the piezoelectric film is a potassium sodium niobate film represented, as its main constituent, by the general formula (1−n)(K1-xNax) NbyO3-nM1M2O3 in which M1 is any one of Ca, Sr, and Ba, M2 is Zr, and x, y, and n respectively are within the ranges of:
- 0.25≦x≦1.00;
- 0.85≦y≦1.10;
- and 0.01≦n≦0.10.
A piezoelectric thin film element comprising:
- an electrode;
- and
- a piezoelectric film adjacent the electrode,
- wherein the piezoelectric film is a potassium sodium niobate film represented, as its main constituent, by the general formula (1−n)(K1-xNax) NbyO3-nM1M2O3 in which M1 is any one of Ca, Sr, and Ba, M2 is any one of Sn and Hf, and x, y, and n respectively are within the ranges of:
- 0.25≦x≦1.00;
- 0.90≦y≦1.05;
- and 0.01≦n≦0.10.
Dependencies are inferred from the claim text.