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US 9,437,798 B2Granted
Combo bio and temperature disposable sensor on flexible foil
AssigneeStmicroelectronics Pte Ltd
InventorsOlivier Le Neel, Suman Cherian, Calvin Leung, Ravi Shankar, Tien Choy Loh, Shian Yeu Kam
Life of this patent
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Abstract
A bio-fluid sensor is formed by depositing polyimide on a glass substrate. Gold and platinum are deposited on the polyimide and patterned to form fluid sensing electrodes, signal traces, and a temperature sensor. The fluid sensor is then fixed to a flexible tape and peeled off of the glass substrate.
Claims20
A method for forming a fluid sensor test strip, the method comprising:
- depositing a first dielectric material;
- etching a plurality of apertures in the first dielectric material;
- depositing a first metal layer on the first dielectric material and in the apertures to form a first and a second electrode and contact pads in the apertures;
- depositing a second metal layer in contact with the first metal layer, the second metal layer being of a material that has a resistance generally proportional to temperature;
- etching the second metal layer to define a temperature sensing resistor of the second metal layer;
- depositing a second dielectric material in the apertures adjacent the first and second metal layers;
- and
- depositing an enzyme on the first and second electrodes and extending from the first electrode to the second electrode, the enzyme configured to pass a sensor current between the first and the second electrodes indicative of a concentration of a test chemical in a test fluid when the test fluid is placed on the enzyme.
5 more elements
A method for forming a fluid sensor test strip, the method comprising:
- depositing a first dielectric material on a surface of a substrate;
- opening a plurality of apertures in the first dielectric material;
- forming a first and second electrodes and a plurality contact pads in the apertures by depositing a first metal layer on the first dielectric material and on the surface of the substrate in the apertures;
- depositing a second metal layer on the first dielectric material;
- etching the second metal layer to form a temperature sensing resistor connected between respective contact pads of the plurality of contact pads;
- depositing a second dielectric material on the first and second metal layers;
- removing the substrate from the first dielectric material, the plurality of contact pads, and the plurality of electrodes;
- and
- depositing an enzyme on the first and second electrodes, the enzyme configured to pass a sensor current between the first and the second electrodes indicative of a concentration of a test chemical in a test fluid when the test fluid is placed on the enzyme.
6 more elements
A fluid sensor test strip comprising:
- a substrate;
- a first dielectric layer on the substrate;
- a second dielectric layer on the first dielectric layer, the second dielectric layer having a planar top surface;
- a temperature sensing resistor between the first and second dielectric layers;
- a plurality of apertures formed in the second dielectric layer;
- first and second electrodes and a plurality of contact pads each in a respective one of the plurality of apertures and having respective top surfaces planar with the top surface of the second dielectric layer;
- and
- an enzyme on the first and second electrodes, the enzyme configured to pass a sensor current between the first and second electrodes indicative of a concentration of a test chemical in a test fluid when the test fluid is placed on the enzyme.
5 more elements
Dependencies are inferred from the claim text.