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US 9,437,677 B2Granted
Deposition on a nanowire using atomic layer deposition
AssigneeGlobalfoundries Inc.
InventorsDechao Guo, Zhengwen Li, Kejia Wang, Zhen Zhang, Yu Zhu
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Abstract
A semiconductor device includes a substrate, a nanowire, a first structure, and a second structure. The nanowire is suspended between the first structure and the second structure, where the first structure and the second structure overly the substrate, where the nanowire includes a layer on a surface of the nanowire, where the layer includes at least one of silicide and carbide, where the layer has a substantially uniform shape.
Claims10
A semiconductor device, comprising:
- a substrate, a first structure disposed on the substrate, a second structure disposed on the substrate, a first nanowire suspended between the first structure and the second structure leaving a space between the first nanowire and the substrate, the first nanowire having a first film substantially uniformly disposed on a surface thereof, and a first gate structure between the first structure and the second structure, the first gate structure surrounding a portion of the first nanowire leaving uncovered a first portion of the first nanowire between the first gate structure and the first structure and a second portion of the first nanowire between the first gate structure and the second structure, a third structure disposed on the substrate, a fourth structure disposed on the substrate, a second nanowire suspended between the third structure and the fourth structure leaving a space between the second nanowire and the substrate, the second nanowire having a second film substantially uniformly disposed on a surface thereof, and a second gate structure between the third structure and the fourth structure, the second gate structure surrounding a portion of the second nanowire leaving uncovered a first portion of the second nanowire between the second gate structure and the third structure and a second portion of the second nanowire between the second gate structure and the fourth structure, where the first film defines a first layer and the second film defines a second layer, the first layer and the second layer each comprising nickel and at least one of silicide and carbide, where the first film is doped with a first dopant, where the second film is doped with a second dopant that is different from the first dopant, and where the semiconductor device is formed in accordance with a process comprising:
- masking the second nanowire, the third structure, the fourth structure, and the second gate structure, and performing atomic layer deposition to deposit the first film at least on a surface of the first nanowire;
- masking the first nanowire, the first structure, the second structure, and the first gate structure, and performing a second atomic layer deposition to deposit the second film at least on a surface of the second nanowire;
- performing a heat treatment on the semiconductor device to form the first layer, from the first film, on at least a portion of the first nanowire, and to form the second layer, from the second film, on the second nanowire, where the first layer and the second layer substantially evenly coat the at least a portion of the first nanowire and at least a portion of the second nanowire;
- and
- removing any unreacted portions of the first film and the second film.
3 more elements
A semiconductor device comprising:
- a substrate;
- a first structure;
- a second structure;
- a nanowire suspended between the first structure and the second structure leaving a space between the nanowire and the substrate;
- and
- a gate structure between the first structure and the second structure leaving a first space between the first structure and the gate structure and a second space between the second structure and the gate structure, the gate structure surrounding at least a portion of the nanowire,
- where the first structure and the second structure overly the substrate, and the nanowire comprises a layer on a surface of the nanowire,
- where the layer comprises nickel and at least one of silicide and carbide, where the layer has a substantially uniform shape, and where the substantially uniform shape comprises a substantially uniform coverage of the surface of the nanowire to reduce stress in the nanowire.
5 more elements
Dependencies are inferred from the claim text.