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US 9,437,676 B2Granted
Layer system
AssigneeMicronas GmbH
InventorsChristoph Wilbertz, Dominik Zimmermann
Life of this patent
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Abstract
A layer system having a layer region whereby the layer region has a single-crystal silicon substrate with a front side and a back side, and whereby a textured surface is formed on the front side and the textured surface has a topography with different heights and a thin film layer of a metal oxide and/or an oxide ceramic is formed on the textured surface, whereby the thin film layer covers the textured surface.
Claims22
A layer system having a layer region, the layer region comprising:
- a single-crystal silicon substrate with a front side and a back side;
- a textured surface formed on a first portion of the front side, the textured surface having a topography;
- an intermediate layer disposed only on peaks of the topography;
- and
- a thin film layer of a metal oxide and/or an oxide ceramic formed on both the textured surface and a second portion of the front side not covered by the textured surface, the thin film layer covering the textured surface.
2 more elements
A layer system having a layer region, the layer region comprising:
- a single-crystal silicon substrate with a front side and a back side;
- a textured surface formed on a first portion of the front side, the textured surface having a topography with different heights;
- and
- a thin film layer of a metal oxide and/or an oxide ceramic formed on the textured surface and a second portion of the front side not covered by the textured surface, the thin film layer covering the entire textured surface such that an outermost thin film layer surface is substantially flat.
1 more element
A layer system having a layer region, the layer region comprising:
- a single-crystal silicon substrate with a front side and a back side;
- a textured surface formed on a first portion of the front side, the textured surface having a topography with different heights;
- an intermediate metallic layer formed on the textured surface and a second portion of the front side not covered by the textured surface;
- and
- a thin film layer of a metal oxide and/or an oxide ceramic formed on the intermediate metallic layer of the textured surface and the portion of the front side not covered by the textured surface, the thin film layer covering the textured surface.
2 more elements
Dependencies are inferred from the claim text.