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US 9,437,640 B2Granted
Engineering induced tunable electrostatic effect
AssigneeApplied Materials, Inc.
InventorsSherry Mings, Patricia M. Liu, Steven C. H. Hung
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Abstract
Backside illuminated sensors and methods of manufacture are described. Specifically, a backside illuminated sensor with a dipole modulating layer near the photodiode is described.
Claims20
A method of forming a device, the method comprising:
- forming a photodiode on a surface adjacent to and in electrical communication with a gate electrode, the photodiode formed in an insulating layer on the surface;
- forming an oxide layer having a thickness on the insulating layer;
- and
- depositing an insulator having a thickness on the oxide layer, the insulator comprising a dipole modulating layer having a thickness greater than about 10 Å and a fixed charge layer.
1 more element
A backside illuminated sensor comprising:
- a substrate with a gate electrode thereon;
- a photodiode in an insulating layer, the photodiode in electrical communication with the gate electrode, the insulating layer having a top above a top of the photodiode;
- an oxide layer having a thickness up to about 30 Å on the insulating layer;
- and
- an insulator above the oxide layer, the insulator comprising a dipole modulating layer and a fixed charge layer.
2 more elements
A backside illuminated sensor comprising:
- a substrate with a gate electrode thereon;
- an insulating layer having a top on the gate electrode;
- a photodiode having a top formed in the insulating layer and in electrical communication with the gate electrode, the top of the insulating layer being above the top of the photodiode;
- an oxide layer at the insulating layer;
- an insulator having a thickness less than about 150 Å above the oxide layer, the insulator comprising a dipole modulating layer and a fixed charge layer, the fixed charge layer comprising a first fixed charge sub-layer and a second fixed charge sub-layer and the dipole modulating layer is between the first fixed charge sub-layer and the second fixed charge sub-layer;
- and
- an antireflective coating over the insulator;
- and
- a color filter and a lens positioned over the antireflective coating to direct light toward the photodiode.
6 more elements
Dependencies are inferred from the claim text.