Semiconductor device and manufacturing method thereof
AssigneeRenesas Electronics Corporation
InventorKeiichiro Kashihara
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AssigneeRenesas Electronics Corporation
InventorKeiichiro Kashihara
Estimating the term…
Provided is a semiconductor device which allows an alignment mark used for the manufacturing of a solid-state image sensor (semiconductor device) having a back-side-illumination structure to be formed in a smaller number of steps. The semiconductor device includes a semiconductor layer having a first main surface and a second main surface opposing the first main surface, a plurality of photodiodes which are formed in the semiconductor layer and in each of which photoelectric conversion is performed, a light receiving lens disposed over the second main surface of the semiconductor layer to supply light to each of the photodiodes, and a mark for alignment formed inside the semiconductor layer. The mark for alignment is formed so as to extend from the first main surface toward the second main surface and have a protruding portion protruding from the second main surface in a direction toward where the light receiving lens is disposed.
A semiconductor device, comprising:
Dependencies are inferred from the claim text.