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US 9,437,630 B2Granted
Semiconductor photomultiplier
AssigneeSensL Technologies Ltd.
InventorsLiam Wall, Kevin O'Neill, John Carlton Jackson
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Abstract
The present disclosure relates to photon detectors. In particular, the present disclosure relates to high sensitivity photon detectors such as semiconductor photomultipliers. A semiconductor photomultiplier is described which comprises an array of interconnected photosensitive microcells; and at least one dark count rate (DCR) suppression element associated with the array.
Claims31
A semiconductor photomultiplier comprising:
- an array of interconnected photosensitive microcells;
- and
- a plurality of dark count rate (DCR) suppression elements associated with the array;
- wherein each DCR suppression element is a dummy electrical component that is not coupled to a power track and is electrically isolated from the array of interconnected photosensitive microcells;
- wherein the array of interconnected photosensitive microcells and the DCR suppression elements are configured to simultaneously receive light.
2 more elements
A substrate comprising:
- an array of interconnected photosensitive microcells;
- and
- a plurality of dark count rate (DCR) suppression elements associated with the array;
- wherein each DCR suppression element is a dummy electrical component that is not coupled to a power track and is electrically isolated from the array of interconnected photosensitive microcells;
- wherein the array of interconnected photosensitive microcells and the DCR suppession elements are configured to simultaneously receive light.
2 more elements
A method of fabricating a semiconductor photomultiplier;
- the method comprising:
- providing a plurality of interconnected photosensitive cells on a substrate, and
- providing a pluality of DCR suppression elements associated with the array;
- wherein each DCR suppression element is a dummy electrical component which is not coupled to a power track and is electrically isolated from the array of interconnected photosensitive microcells;
- wherein the array of interconnected photosensitive microcells and the DCR suppession elements are configured to simultaneously receive light.
2 more elements
A semiconductor photomultiplier comprising:
- an array of interconnected photosensitive microcells operably coupled between cathode and anode power tracks;
- and
- a plurality of dark count rate (DCR) suppression elements associated with the array;
- wherein each DCR suppression element is a dummy electrical component that is electrically isolated from the cathode and anode power tracks;
- wherein the array of interconnected photosensitive microcells and the DCR suppession elements are configured to simultaneously receive light.
2 more elements
Dependencies are inferred from the claim text.