Semiconductor device

Abstract

A semiconductor device according to an embodiment includes a stacked body, and a semiconductor pillar. The stacked body includes first insulating layers and conductive layers. The conductive layer includes silicon. At least one of the conductive layers includes a first portion, a second portion, and a third portion. The first portion includes a first element selected from at least one of boron and phosphorus. The second portion includes the first element. The third portion is provided between the first portion and the second portion in a stacking direction of the conductive layers and the first insulating layers. The third portion includes a second element. The second element is selected from at least one of carbon, nitrogen, oxygen, and germanium. The semiconductor pillar pierces through the stacked body. The semiconductor pillar extends in the stacking direction.

Dependencies are inferred from the claim text.