Substrate processing apparatus and method of manufacturing semiconductor device

A substrate processing apparatus comprising:

• a process furnace configured to process a substrate;
• a boat configured to support a plurality of substrates;
• a boat elevator configured to move the boat upward and downward;
• and
• a computer configured to:
• control the process furnace for performing a process recipe including a plurality of steps including a boat loading step, a decompression step, a film forming step, a purge step, and a boat unloading step, and
• monitor a progress of each of the plurality of steps of the process recipe,
• wherein, when a first time elapsed from a start of the decompression step exceeds an allowable time previously allocated to the decompression step while waiting for a completion of the decompression step in a hold state, and a start of a next step is postponed by the computer, even when a second time for starting the next step lapses during performing the decompression step, the computer is further configured to:
• transmit an alarm message to a memory of the computer so as to report that the allowable time is exceeded, perform the purge step and the boat unloading step according to an error of exceeding the allowable time, and terminate the process recipe and display a message reporting an abnormal termination.

A substrate processing apparatus comprising:

• a process furnace configured to process a substrate;
• a boat configured to support a plurality of substrates;
• a boat elevator configured to move the boat upward and downward;
• and
• a computer configured to:
• control the process furnace for performing a process recipe including a plurality of steps including a boat loading step, a film forming step, and a boat unloading step, and
• monitor a progress of each of the plurality of steps of the process recipe,
• wherein, when a first time elapsed from a start of the boat unloading step exceeds an allowable time previously allocated to the boat unloading step while waiting for a completion of the boat unloading step in a hold state, and a start of a next step is postponed by the computer, even when a second time for starting the next step lapses during performing the boat unloading step, the computer is further configured to:
• transmit an alarm message to a memory of the computer so as to report that the allowable time is exceeded, re-perform the boat unloading step according to an error of exceeding the allowable time, and terminate the process recipe and display a message reporting an abnormal termination.