Back to results
US 9,437,420 B2Granted
Capacitors including amorphous dielectric layers and methods of forming the same
AssigneesSamsung Electronics Co., Ltd., NaMLab gGmbH
InventorsKyu-Ho Cho, Youn-Soo Kim, Han-Jin Lim, Steve Knebel, Uwe Schroeder
Life of this patent
Estimating the term…
Abstract
A capacitor can include a crystallized metal oxide dielectric layer having a first dielectric constant and an amorphous metal oxide dielectric layer, on the crystallized metal oxide dielectric layer, where the amorphous metal oxide dielectric layer has a second dielectric constant that is less than the first dielectric constant and is greater than a dielectric constant of aluminum oxide.
Claims20
A capacitor, comprising:
- a lower electrode on a substrate;
- a dielectric layer structure, including:
- a first dielectric layer on the lower electrode, the first dielectric layer including a first crystalline metal oxide;
- and
- a second dielectric layer on the first dielectric layer, the second dielectric layer including an amorphous metal oxide having a dielectric constant less than that of the first dielectric layer and greater than that of aluminum oxide;
- and
- an upper electrode on the dielectric layer structure.
4 more elements
A method of forming a capacitor, the method comprising:
- forming a lower electrode on a substrate;
- forming a dielectric layer structure on the lower electrode, the dielectric layer structure including a first dielectric layer and a second dielectric layer sequentially stacked, the first dielectric layer containing a first metal oxide, and the second dielectric layer containing a second metal oxide having a dielectric constant less than that of the first metal oxide in a crystallized state and greater than that of aluminum oxide;
- and
- forming an upper electrode on the dielectric layer structure.
1 more element
A capacitor, comprising:
- a crystallized metal oxide dielectric layer having a first dielectric constant;
- and
- an amorphous metal oxide dielectric layer on the crystallized metal oxide dielectric layer, the amorphous metal oxide dielectric layer having a second dielectric constant that is less the first dielectric constant and is greater than a dielectric constant of aluminum oxide.
Dependencies are inferred from the claim text.