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US 9,437,395 B2Granted
Method and compound system for inspecting and reviewing defects
AssigneeHermes Microvision, Inc.
InventorShuai Li
Life of this patent
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AssigneeHermes Microvision, Inc.
InventorShuai Li
Estimating the term…
The present invention provides an improved electron-optical apparatus for the inspection and review of the specimen, and for the defect inspection, an inspection mode of operation is performed to generate inspection data, wherein the large beam current is formed by a magnetic immersion lens to scan the specimen, and preferably the objective lens system, a swing objective retarding immersion lens, focuses the beam current and generates the large scanning field, and for the defect review, the review mode of operation is performed to analyze the defects, wherein the large beam current is abandoned and the small beam current is adopted to examine the specimen without a large scanning field, and in order to properly select and detect signal charged particles excited from the specimen, a first Wien filter is utilized to select the acquired signal particles and a second Wien filter is used to compensate the aberrations induced when the signal particles pass through the first Wien filter.
A charged particle beam apparatus, comprising:
An apparatus for inspection and/or review of a specimen, comprising:
A method for inspection and review of a specimen, comprising:
Dependencies are inferred from the claim text.