Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method

An exposure method of exposing a substrate with an exposure beam via a projection system, the method comprising:

• driving a substrate stage that is supported by levitation on a base placed under the projection system and has a table that mounts the substrate;
• measuring positional information of the table by a head, of a plurality of heads of a measurement device, that faces a grating section supported by a frame that supports the projection system, the measurement device having the plurality of heads that are provided at the table and each irradiate a measurement beam on the grating section;
• and
• controlling a drive of the substrate stage based on displacement information, at the table, of a head used in measurement of the positional information and the positional information measured by the measurement device, the displacement information being measured in a noncontact manner with a measurement system.

A method of making an exposure apparatus that exposes a substrate with an exposure beam via a projection system, the method comprising:

• supporting the projection system with a frame;
• placing a base under the projection system supported by the frame;
• placing a substrate stage having a table that mounts the substrate, on the base;
• providing a measurement device that has a plurality of heads that are provided at the table and each irradiate a measurement beam on a grating section supported by the frame, and measures positional information of the table by a head, of the plurality of heads, that faces the grating section;
• providing a drive device that drives the substrate stage supported by levitation on the base, to move the substrate;
• providing a measurement system that measures, in a noncontact manner, displacement information, at the table, of a head used in measurement of the positional information;
• and
• providing a controller that controls the drive device to drive the substrate stage based on the displacement information measured by the measurement system and the positional information measured by the measurement device.