Position adjustable probing device and probe card assembly using the same

A probe card assembly comprising:

• a support frame having a first surface, a second surface opposite to the first surface, and a first opening penetrating through the first and second surfaces;
• a space transformer module having a space transformer disposed in the first opening of the support frame;
• a circuit board supporting the support frame and being electrically connected with the space transformer in a way that the circuit board faces the second surface of the support frame;
• an elevation adjusting structure having a plurality of spacers disposed between the support frame and the circuit board for adjusting a height of the support frame relative to the circuit board;
• a probe head supported on the support frame and electrically connected with the space transformer in a way that the probe head faces the first surface of the support frame;
• and
• a needle position adjusting structure having a plurality of spacers disposed between the support frame and the probe head for adjusting a height of the probe head relative to the support frame;
• wherein the space transformer module comprises:
• a substrate frame having a second opening, an inner periphery wall surrounding around the opening, and an outer periphery wall;
• the space transformer disposed in the second opening of the substrate frame;
• and
• a planimetric position adjusting structure comprising:
• a plurality of second positioning threaded holes each penetrating through the substrate frame from the outer periphery wall to the inner periphery wall;
• and
• a plurality of second positioning screws each threaded into one of the second positioning threaded holes and having an end stopped at a lateral side of the space transformer for adjusting a position of the space transformer substrate on a plane.