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US 9,435,828 B2Granted
Method of reconstructing electrical probes
AssigneeGlobalfoundries Inc.
InventorsDavid R. Goulet, Walter V. Lepuschenko
Life of this patent
Estimating the term…
Abstract
A probe, comprising: a shank region having a top surface integrally connected to a bottom surface of a conical region; a pyramidal tip region having a base surface integrally connected to a top surface of the conical region; and wherein the base surface of the pyramidal tip region is contained within a perimeter of the top surface of the conical region. Also a method of fabricating the probe and a method of probing devices under test.
Claims6
A method comprising:
- providing a probe comprising a shank region having a top surface integrally connected to a bottom surface of a conical region, said conical region tapering to a point;
- ion milling a pyramidal tip region having a base and an apex into an upper portion of said conical region, said ion milling removing surface portions of said upper portion of said conical region and removing said point, said apex becoming a new point;
- and
- after said ion milling, a lower portion of said conical region remaining,
- wherein said shank region has a uniform diameter, said lower portion of said conical region tapers from said shank region to said pyramidal tip region at a first angle, and said pyramidal tip region tapers from a base of said pyramidal tip region to said apex at a second angle.
2 more elements
Dependencies are inferred from the claim text.