Spectrometry device and spectrometry method

A spectrometry method for performing spectrometry for light generated in a measurement sample and a reference sample and thereby detecting respective peak positions in spectrums of the measurement sample and the reference sample, comprising:

• a step of concentrating a light beam from a light source on the reference sample by a first lens;
• a step of concentrating a light beam that has passed through the first lens on the measurement sample by a second lens;
• a step of splitting light that is generated in the measurement sample and the reference sample by irradiation of the light beam and has a different wavelength from that of the light beam from light that is heading from the light source toward the measurement sample;
• a step of dispersing light that is generated in the measurement sample and the reference sample and has a different wavelength from that of the light beam into a spectrum;
• and
• a step of obtaining a peak wavelength of a spectrum of light that is dispersed by the spectroscope, wherein the spectroscope disperses the light in a first direction, using a 2D array detector which includes a plurality of pixels arranged in the first direction, and comparing a peak wavelength of light generated in the reference sample with a peak wavelength of light generated in the measurement sample so that the peak wavelength is calibrated while taking account of a fluctuation of a wavelength of a light beam from the light source,
• wherein the reference sample is movably disposed along an optical axis of the first lens to focus the light beam from the first lens on the reference sample,
• wherein the light generated in the measurement sample and the reference sample is detected through a confocal optical system, and
• wherein an intensity of the light from the reference sample is adjusted by moving the reference sample in a direction in which the reference sample is deviated from a focal point of the first lens along an optical axis of the first lens.

A spectrometry device that performs spectrometry for light from a measurement sample and a reference sample and thereby detects respective peak positions in spectrums of the light from the measurement sample and the reference sample, comprising:

• a light source;
• a first lens that concentrates a light beam from the light source on the reference sample;
• a second lens that concentrates a light beam that has passed through the first lens on the measurement sample;
• a spectroscope that disperses light that is generated in the measurement sample and the reference sample by irradiation of the light beam and has a different wavelength from that of the light beam into a spectrum;
• a detector that detects light that is dispersed by the spectroscope;
• light splitter for separating an optical path of light that is heading from the reference sample and the measurement sample toward the spectroscope from an optical path of a light beam that is heading from the light source toward the measurement sample;
• and
• scanner for deflecting the light beam and thereby scanning a position of a light beam on the measurement sample, wherein
• the reference sample is disposed out of an optical axis of the first lens, and
• the scanner deflects the light beam and thereby makes the light beam that is originally incident on the measurement sample incident on the reference sample.

A spectrometry method for performing spectrometry for light generated in a measurement sample and a reference sample and thereby detecting respective peak positions in spectrums of the measurement sample and the reference sample, comprising:

• a step of concentrating a light beam from a light source on the reference sample by a first lens;
• a step of concentrating a light beam that has passed through the first lens on the measurement sample by a second lens;
• a step of splitting light that is generated in the measurement sample and the reference sample by irradiation of the light beam and has a different wavelength from that of the light beam from light that is heading from the light source toward the measurement sample;
• a step of dispersing light that is generated in the measurement sample and the reference sample and has a different wavelength from that of the light beam into a spectrum;
• and
• a step of deflecting the light beam and thereby scanning a position of a light beam on the measurement sample, wherein
• the reference sample is disposed out of an optical axis of the first lens, and
• a scanner deflects the light beam and thereby makes a light beam that originally is incident on the measurement sample incident on the reference sample.