Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output

A non-transitory computer readable storage medium, storing instructions, which when executed by a processor, performs a method for calculating power input to at least one thermal control element of an electrostatic chuck having an array of independently controllable heater zones, the method comprising:

• setting the at least one thermal control element in the electrostatic chuck to a first predetermined power level;
• measuring, with a temperature detector, a first temperature of the at least one thermal control element when the at least one thermal control element is powered at the first predetermined power level;
• setting the at least one thermal control element to a second predetermined power level;
• measuring, with the temperature detector, a second temperature of the at least one thermal control element when the at least one thermal control element is powered at the second predetermined power level;
• calculating a difference between the first temperature and the second temperature that are measured;
• calculating a system response of the at least one thermal control element based on the difference that is calculated;
• inverting the system response that is calculated;
• and
• calibrating the at least one thermal control element of the electrostatic chuck based on the inverted system response.