Gimbaled scanning mirror array

Scanning apparatus, comprising:

• a substrate, which is etched to define an array of two or more parallel micromirrors and a support closely surrounding the array, wherein the micromirrors are coupled to rotate on respective first spindles in mutual synchronization of angular orientation about respective parallel first axes of rotation relative to the support while the support rotates about a second axis relative to the substrate on second spindles that are connected to the support along the second axis;
• an electromagnetic drive, which is coupled to cause the micromirrors and the support to rotate respectively about the first and second axes;
• and
• one or more flexible belts, which comprise thin strips separated by grooves etched through the substrate from the support on one side of the strips and from the micromirrors on the other side of the strips, and
• which are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective first axes.

A method for producing an optical scanning device, the method comprising etching a substrate so as to define:

• an array of two or more parallel micromirrors, comprising at least first and second micromirrors;
• a gimbal, closely surrounding the entire array of micromirrors;
• respective first spindles connecting the micromirrors to the support, thereby defining respective first parallel axes of rotation of the micromirrors relative to the gimbal, and second spindles connecting the gimbal to the substrate and defining a second axis of rotation, perpendicular to the first axes, such that the second spindles are parallel to the second axis;
• and one or more flexible belts, which comprise thin strips separated by grooves etched through the substrate from the gimbal on one side of the strips and from the micromirrors on the other side of the strips, and which have a first end attached to a first edge of the first micromirror and a second end attached to a second edge of the second micromirror and are anchored to the gimbal at a point between the first and second ends so as to mechanically synchronize an angular orientation of oscillation of the micromirrors about the respective first axes, while the gimbal rotates about the second axis relative to the substrate in order to maintain phase locking.

A method for scanning, comprising:

• providing a substrate, which is etched to define an array of two or more parallel micromirrors, a support closely surrounding the array, respective first spindles connecting the micromirrors to the support along respective, parallel first axes, second spindles connecting the support to the substrate along a second axis, perpendicular to the first axes;
• driving the micromirrors to rotate in mutual synchronization of angular orientation about the respective parallel first axes of rotation relative to the support while driving the support to rotate about the second axis relative to the substrate;
• and directing a beam of light toward the micromirror array while the micromirrors and the support rotate, so as to cause the micromirrors to scan the beam over a scene;
• and
• connecting one or more flexible belts, which comprise thin strips separated by grooves etched through the substrate from the support on one side of the strips and from the micromirrors on the other side of the strips, to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective first axes.