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AssigneeHelmut Fischer GmbH Institut für Elektronik und Messtechnik
InventorHelmut Fischer
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The invention relates to a measuring probe for measuring the thickness of thin layers, having a housing (14) with at least one sensor element (17), which is received at least slightly moveably along a longitudinal axis (16) and which comprises at least one first winding device (44), which has a magnetic pot core (41) arranged in the longitudinal axis (16) of the housing (14), and to whose central pin (42) a first and second coil (70, 71) are allocated, and having a spherical positioning cap (21) on the central pin (42) pointing towards the measuring surface of an object to be measured, which cap comprises a bearing surface (57) for fitting on a measuring surface, wherein a second winding device (48) is provided allocated to the spherical positioning cap (21), which device is formed from a discoidal or annular carrier (49) having at least one Archimedean coil (51), and a shield (83, 85) is provided at least partially between the first and second winding device (44, 48).
A measuring probe for measuring the thickness of thin layers with a housing, having at least one sensor element, which is received moveably along a longitudinal axis and which comprises a magnetic pot core for receiving at least one first winding device, and which comprises a central pin arranged in the longitudinal axis of the housing, and a first and second coil of the first winding device are disposed about the central pin, and having a spherical positioning cap on the central pin pointing towards the measuring surface of the thin layer to be measured, which cap comprises a bearing surface for fitting on the measuring surface, wherein a second winding device is disposed about the spherical positioning cap, which second winding device is formed from a discoidal or annular carrier having at least one Archimedean coil, and in that a shield is provided at least partially between the first and second winding device, wherein a sleeve made from a ferritic material is provided on the spherical positioning cap and the sleeve forms the shield in a radial direction towards the second winding device.
A measuring probe for measuring the thickness of thin layers with a housing, having at least one sensor element, which is received moveably along a longitudinal axis and which comprises at least one first winding device, which has a magnetic pot core arranged in the longitudinal axis of the housing, and to whose central pin a first and second coil are disposed about, and having a spherical positioning cap on the central pin pointing towards the measuring surface of the thin layer to be measured, which cap comprises a bearing surface for fitting on the measuring surface, wherein a second winding device is disposed about the spherical positioning cap, which second winding device is formed from a discoidal or annular carrier having at least one Archimedean coil, and in that a shield is provided at least partially between the first and second winding device, wherein a shielding element made from ferritic material is provided between the first and second winding device in the pot core, which forms the shield in an axial direction towards the second winding device.
Dependencies are inferred from the claim text.