Apparatus for manufacturing ingot
AssigneeTechnovalue Co., Ltd.
InventorsHyun Goo Kwon, Yeo Kyun Yoon, Min Soo Son
Life of this patent
Estimating the term…
Abstract
Disclosed is an ingot manufacturing apparatus that includes: a chamber; a crucible which is disposed within the chamber and has a melting zone where silicon particles are melted; an inner wall which is disposed within the crucible and has a growth zone where an ingot grows from molten silicon introduced from the melting zone; a feeding part which supplies the silicon particles and sweeping gas to the inside of the chamber; and a suction part which surrounds the feeding part and discharges the sweeping gas supplied through the feeding part to the outside of the chamber.
Claims21
An ingot manufacturing apparatus comprising:
- a chamber;
- a crucible which is disposed within the chamber and has a melting zone where silicon particles are melted;
- an inner wall which is disposed within the crucible and has a growth zone where an ingot grows from molten silicon introduced from the melting zone;
- a feeding part which supplies the silicon particles and sweeping gas to the inside of the chamber;
- and
- a suction part which surrounds the feeding part and discharges the sweeping gas supplied through the feeding part to the outside of the chamber.
An ingot manufacturing apparatus comprising:
- a chamber;
- a crucible which is disposed within the chamber and has a melting zone where silicon particles are melted;
- an inner wall which is disposed within the crucible and has a growth zone where an ingot grows from molten silicon introduced from the melting zone;
- a feeding part which supplies the silicon particles and sweeping gas to the inside of the chamber;
- and
- a suction part which is disposed within the feeding part and discharges the sweeping gas supplied through the feeding part to the outside of the chamber.
An ingot manufacturing apparatus comprising:
- a chamber;
- a crucible which is disposed within the chamber and has a melting zone where silicon particles are melted;
- an inner wall which is disposed within the crucible and has a growth zone where an ingot grows from molten silicon introduced from the melting zone;
- a feeding part which supplies the silicon particles and sweeping gas to the inside of the chamber;
- a suction part which discharges the sweeping gas supplied through the feeding part to the outside of the chamber, surrounds the feeding part or is disposed within the feeding part;
- a communicating tube which communicates the inside of the chamber and the suction part and provides a flow path through which the sweeping gas moves to the outside of the chamber;
- a main filter which filters dusts included in the sweeping gas moving through the communicating tube;
- and
- a main pump which provides a pressure required for the sweeping gas to move through the communicating tube.
Dependencies are inferred from the claim text.