Radical reactor with inverted orientation

A deposition apparatus comprising:

• an injector for injecting gas onto a substrate;
• and
• a radical reactor for injecting radicals onto the substrate, comprising:
• a body formed with a cavity extending across the body and a conduit from the cavity to a surface of the body facing a substrate passing across the radical reactor, and
• an elongated structure contained in the cavity, the elongated structure formed with a radical chamber for receiving gas through a passage in the elongated structure and generating radicals by disassociating the received gas,
• wherein the radicals are discharged from the elongated structure into the cavity via a discharge port not aligned with the conduit of the body.