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US 9,435,022 B2Granted
Deposition source
AssigneeSamsung Display Co., Ltd.
InventorsHye-Yeon Shim, Chang-Soon Ji, Jong-Woo Lee, Do-Sung Kwon
Life of this patent
Estimating the term…
Abstract
A deposition source with uniform deposition characteristics includes a crucible in which a deposition material is disposed; a heat transfer member disposed on upper portions of the deposition material in the crucible; and an accommodation member for accommodating the heat transfer member and including a mesh plate.
Claims6
A method of performing deposition by using a crucible, the crucible having an opening, the method comprising:
- placing a housing in the crucible between the opening of the crucible and an upper surface of a deposition material in the crucible, the housing being movable with respect to the crucible during the deposition, having a plurality of openings, and an outer perimeter of the housing having a size that corresponds to an inner circumferential surface of the crucible, the housing accommodating a heat transfer member, the heat transfer member comprising particles having a diameter greater than a size of each of the plurality of openings in the housing, the particles being non-reactive with the deposition material;
- and
- heating the crucible and the particles such that the particles heat the upper surface of the deposition material to transform the deposition material into a gas which passes through the particles and the plurality of openings to a substrate.
Dependencies are inferred from the claim text.