Part inspection apparatus and handler
AssigneeSeiko Epson Corporation
InventorsMasami Maeda, Toshioki Shimojima
Life of this patent
Estimating the term…
Abstract
A handler includes a supply shuttle plate on which a device is placed and cooled, and a transfer robot configured to transfer the device placed on the supply shuttle plate from the supply shuttle plate. The transfer robot includes an adsorbing portion configured to adsorb the device placed on the supply shuttle plate thereon, a vertical movement arm configured to move the adsorbing portion away from the supply shuttle plate, an arm box configured to accommodate the adsorbing portion together with the device in a state of being kept away from the supply shuttle plate, and a dry air supply unit configured to supply dry gas into the arm box.
Claims8
A part inspection apparatus comprising:
- a placing portion on which an object to be transferred is placed and on which the object to be transferred is cooled;
- a transfer robot configured to transfer the object from the placing portion;
- and
- a tester configured to inspect the object to be transferred, wherein
- the transfer robot includes:
- a holding portion configured to hold the object to be transferred placed on the placing portion;
- an arm configured to move the holding portion away from the placing portion;
- a housing member configured to accommodate the holding portion together with the object to be transferred in a state of being kept away from the placing portion;
- and
- a dry gas supply unit configured to supply dry gas into the housing member,
- wherein the housing member is a first housing member,
- the dry gas supply unit is a first dry gas supply unit,
- a second housing member as a housing member is configured to accommodate the placing portion, and
- a second dry gas supply unit is configured to supply dry gas into the second housing member.
A handler comprising:
- a placing portion on which an object to be transferred is placed and on which the object to be transferred is cooled;
- and
- a transfer robot configured to transfer the object from the placing portion, wherein
- the transfer robot includes:
- a holding portion configured to hold the object to be transferred placed on the placing portion;
- an arm configured to move the holding portion away from the placing portion;
- a housing member configured to accommodate the holding portion together with the object to be transferred in a state of being kept away from the placing portion;
- and
- a dry gas supply unit configured to supply dry gas into the housing member,
- wherein the housing member is a first housing member,
- the dry gas supply unit is a first dry gas supply unit,
- a second housing member as a housing member is configured to accommodate the placing portion, and
- a second dry gas supply unit is configured to supply dry gas into the second housing member.
Dependencies are inferred from the claim text.