Method of manufacturing master mold

A method of manufacturing a master mold, the method comprising:

• forming a plurality of replica resin layers using a mold;
• forming a replica template by bonding the plurality of replica resin layers on a template;
• separating the mold from the plurality of replica resin layer,
• forming a first photoresist layer having a pattern corresponding to a pattern of the plurality of replica resin layers;
• forming a second photoresist layer having a pattern corresponding to the pattern of the first photoresist layer on the first photoresist layer;
• disposing the second photoresist layer on a substrate;
• separating the second photoresist layer from the first photoresist layer;
• and
• forming the master mold having a large area by etching a surface of the substrate based on the pattern shape of the second photoresist layer,
• wherein the mold is separated from the plurality of replica resin layer by bonding a surface of the plurality of replica resin layer, on which the pattern of the plurality of replica resin layers is not formed, to an adhesive layer on the template.