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US 9,434,047 B2Granted
Retainer ring
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuo-Cheng Lien, Hsin-Hsien Lu
Life of this patent
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Abstract
A retainer ring for chemical-mechanical polishing or other processes includes an outside ring and an inside ring that is attached to the outside ring. The inside ring is softer than the outside ring in hardness.
Claims20
A retainer ring, comprising:
- an outside ring with a recess along an inner surface of the outside ring;
- and
- an inside ring with a jut extending from an outer surface of the inside ring into the recess, the inside ring being attached to the outside ring by friction between the jut and the recess,
- wherein the jut has a first width at a first location and a second width at a second location, the second location being interposed between the first location and the outer surface of the inside ring, the first width being greater than the second width, and
- wherein the inside ring is softer than the outside ring in hardness.
2 more elements
A retainer ring, comprising:
- an outside ring;
- and
- an inside ring attached to the outside ring by a friction fitting between a protrusion of the inside ring and a groove of the outside ring, the protrusion having a first width at a first location and a second width at a second location, the first width being less than the second width, the second location being more a distal location of the protrusion from an innermost edge of the inside ring than the first location,
- wherein the protrusion extends from an outer sidewall of the inside ring into the groove disposed along an inner sidewall of the outside ring,
- wherein the inside ring is softer than the outside ring in hardness.
2 more elements
A retainer ring comprising:
- an outside ring having a first hardness;
- an inside ring having a second hardness, the second hardness being less than the first hardness;
- and
- an attachment mechanism connecting the outside ring and the inside ring, comprising:
- a groove along an inner surface of the outside ring;
- and
- a protrusion of the inside ring configured to fit within the groove and form a friction fitting, the protrusion having a width that increases as the protrusion extends outward.
4 more elements
Dependencies are inferred from the claim text.