Pixel unit and method of manufacturing the same, array substrate and display device
AssigneeBoe Technology Group Co., Ltd.
InventorsZheng Liu, Im Jang Soon
Life of this patent
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Abstract
Embodiments of the present invention provide a method of manufacturing a pixel unit, in which only a single patterning process and a single doping process are performed on a polysilicon layer so as to form heavily doped regions of a thin film transistor and a lower electrode of a storage capacitor respectively, thereby reducing numbers of photolithography and masking processes required to manufacture a LTPS-TFT, shortening time periods for development and mass production, and reducing complexity of processes as well as monitoring difficulty, and decreasing the production cost. The present invention further provides a pixel unit manufactured according to the method, an array substrate and a display device including the same.
Claims8
A method of manufacturing a pixel unit, including steps of:
- forming a polysilicon layer on a substrate;
- performing a single patterning process on the polysilicon layer so as to form an active region of a thin film transistor and a lower electrode region of a storage capacitor;
- forming a first insulating layer on the polysilicon layer, portions of the first insulating layer being used as a gate insulating layer of the thin film transistor and a dielectric layer of the storage capacitor;
- performing a single doping process on the active region and the lower electrode region so as to form heavily doped regions of the thin film transistor and a lower electrode of the storage capacitor respectively;
- forming a gate of the thin film transistor and an upper electrode of the storage capacitor on the first insulating layer;
- forming, before performing an ion activation treatment in the heavily doped regions and the lower electrode region, a second insulating layer on the first insulating layer, the gate and the upper electrode;
- and
- after forming the second insulating layer, processing the substrate at a temperature above 400° C. so that an ion activation reaction and a hydrogenation reaction occur in the active region and the lower electrode region.
Dependencies are inferred from the claim text.