Lithographic apparatus and device manufacturing method

A lithographic apparatus, comprising:

• a movable table;
• a projection system configured to project a patterned radiation beam onto a substrate, the projection system having an optical axis running through a space between a final element of the projection system and the table;
• a liquid supply system configured to provide liquid to the space;
• and
• a barrier member configured to at least partly confine the liquid to the space, the barrier member comprising:
• a diagonally extending inner surface facing toward the optical axis,
• an inlet configured to provide liquid to the space, the inlet comprising an array of inlet orifices defined in or by the inner surface and configured to provide an essentially horizontal flow of liquid therefrom, and
• an extractor configured to remove liquid from the space, the extractor comprising a two dimensional array of outlet orifices, extending at least partly in a horizontal direction, through which the liquid can be extracted from the space.

A lithographic apparatus, comprising:

• a movable table;
• a projection system configured to project a patterned radiation beam onto a substrate, the projection system having an optical axis running through a space between a final element of the projection system and the table;
• a liquid supply system configured to provide liquid to the space;
• and
• a barrier member configured to at least partly confine the liquid to the space, the barrier member comprising:
• an inlet configured to provide liquid to the space, the inlet comprising an array of inlet orifices configured to provide an essentially horizontal flow of liquid therefrom, the array of inlet orifices extending along a side of an exposure field of the patterned radiation beam and the inlet orifices commonly connected to a channel in the barrier member, and
• an extractor configured to remove liquid from the space, the extractor comprising a two dimensional array of outlet orifices, extending at least partly in a horizontal direction, through which the liquid can be extracted from the space.