Optic modulator and method of manufacturing the same
AssigneesSK hynix Inc., Seoul National University R&Db Foundation
InventorsJong-Ho Lee, Keon Yoo
Life of this patent
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Abstract
An optic modulator may include: an optical waveguide including a ridge-shaped portion having a first region and a second region over the first region; a slab-shaped portion being in contact with a first region of the ridge-shaped portion; an optical waveguide electrode forming a Schottky contact with a second region of the ridge-shaped portion; metal plugs being in contact with the slab-shaped portion and the optical waveguide electrode, respectively; and metal pads connected to the respective metal plugs.
Claims20
An optic modulator comprising:
- an optical waveguide comprising a ridge-shaped portion having a first region and a second region over the first region;
- a slab-shaped portion being in contact with a first region of the ridge-shaped portion;
- an optical waveguide electrode forming a Schottky contact with a second region of the ridge-shaped portion;
- metal plugs being in contact with the slab-shaped portion and its the optical waveguide electrode, respectively;
- and
- metal pads connected to the respective metal plugs.
The optic modulator of claim wherein slab-shaped portion comprises:
- a first slab-shaped portion being in contact with one side of the first region of the ridge-shaped portion;
- and
- a second slab-shaped portion being in contact with the other side of the first region of the ridge-shaped portion.
An optic modulator comprising:
- a Schottky diode comprising a ridge-shaped portion containing intrinsic silicon, a slab-shaped portion being in contact with a first region of the ridge-shaped portion and containing extrinsic silicon, and ITO forming a Schottky contact with a second region of the ridge-shaped portion;
- metal plugs being in contact with the slab-shaped portion and the optical waveguide electrode, respectively;
- and
- metal pads connected to the respective metal plugs.
An optic modulator comprising:
- an optical waveguide comprising a ridge-shaped portion having a first region and a second region over the first region;
- a slab-shaped portion being in contact with the first region of the ridge-shaped portion;
- an electrode covering the top surface and both sidewalls of the second region of the ridge-shaped portion;
- an inter-insulating layer positioned between the electrode and the second region;
- metal plugs being in contact with the slab-shaped portion and an electrode, respectively;
- and
- metal pads connected to the respective metal plugs.
Dependencies are inferred from the claim text.