Inductive inertial sensor architecture and fabrication in packaging build-up layers

A method of determining an angular rate of rotation of a mobile device including a packaged integrated circuit (IC), the method comprising:

• driving a time varying current through a first coil disposed within a first magnetic field of a first magnet embedded, along with the first coil, within the IC package dielectric to vibrate the first coil in a first dimension relative to the IC package;
• generating first and second time varying voltage signals with a pair of sense coils through mutual induction responsive to displacement of the first coil, the first and second time varying voltage signals deviating from each other as a function of an angular velocity in a second dimension, orthogonal to the first dimension;
• and
• determining a first of a yaw, pitch, or roll of the mobile device based on the first and second time varying voltage signals,
• wherein the first coil is planar in a plane parallel to a plane of the substrate and the first coil comprises four substantially orthogonal segments with a plurality of conductive anchors, and wherein the time varying current is driven through at least one pair of the conductive anchors.

A gyroscope, comprising:

• a substrate including a magnet;
• a drive coil disposed over the substrate and within a magnetic field of the magnet to vibrate in a first dimension relative to the substrate as a function of a time varying current passing through the drive coil,
• at least one sense coil disposed over the substrate and positioned with respect to the drive coil to register an inductance that varies as a function of an angular velocity in a second dimension, orthogonal to the first dimension,
• wherein the time varying current is driven through a first pair of conductive coil anchors, and wherein the sense coils include a second pair of conductive coil anchors and a portion of the coil disposed there between, the second pair of coil anchors registering self inductances that vary as a function of an angular velocity in a second dimension, orthogonal to the first dimension, and wherein a resonant frequency varies as a function of the self inductance and capacitance of a capacitor coupled across the second pair of coil anchors,
• wherein the first dimension is parallel to the plane of the substrate, wherein the magnetic field and the angular velocity are perpendicular to the plane of the substrate, and wherein the second pair of anchors comprise springs to compress and extend along the second dimension in a manner that changes their self inductance.