Vibration driven power generation element and method of manufacture thereof
AssigneeAOI Electronics Co., Ltd.
InventorsHiroki Hayashi, Masato Suzuki, Takashi Konno
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Abstract
A vibration driven power generation element according to the present invention includes: a three dimensionally shaped movable comb tooth electrode comprising a plurality of comb teeth of which interiors are filled with an insulating material, and having an SiO2 layer into which alkali ions are injected provided upon its outer surface; and a fixed type comb tooth electrode provided with a plurality of comb teeth made from Si the interiors of which are doped so as to have low electrical resistance, being arranged with the three dimensionally shaped movable comb tooth electrode opposed thereto and interleaved thereinto.
Claims22
A vibration driven power generation element, comprising:
- a three dimensionally shaped movable comb tooth electrode having a plurality of comb teeth, wherein the plurality of comb teeth each includes an interior filled with insulating material;
- an electret electrode SiO2 layer including alkali ions, wherein the electret electrode SiO2 layer is arranged upon an outer surface of each of the plurality of comb teeth of the three dimensionally shaped moveable comb tooth;
- and
- a fixed type comb tooth electrode having a plurality of comb teeth, wherein the plurality of comb teeth include doped Si interiors so as to have low electrical resistance, the fixed type comb tooth electrode being arranged opposed to and interleaved with the three dimensionally shaped moveable comb tooth electrode.
Dependencies are inferred from the claim text.