Metal-insulator-metal capacitor with current leakage protection
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChen-Jong Wang, Huey-Chi Chu, Kuo-Ji Chen, Ming-Hsiang Song, Wen-Chuan Chiang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChen-Jong Wang, Huey-Chi Chu, Kuo-Ji Chen, Ming-Hsiang Song, Wen-Chuan Chiang
Estimating the term…
A metal insulator metal (MIM) capacitor includes a top electrode, a first via contacting a first surface of the top electrode, a bottom electrode, a second via contacting a second surface of the bottom electrode, and an insulator between the top electrode and the bottom electrode. One of the top and the bottom electrodes includes a first part and a second part. The first part has a first edge and a second edge opposing the first edge. The second part shares the second edge with the first part. At least a portion of the first edge contacts the respective via, and a first one of the first and the second edges is longer than a second one of the first and the second edges.
A metal insulator metal (MIM) capacitor, comprising:
A metal insulator metal (MIM) capacitor comprising:
A metal insulator metal (MIM) capacitor comprising:
Dependencies are inferred from the claim text.