FZ seed holder and pre-heater
AssigneeMitsubishi Polycrystalline Silicon America Corporation (MIPSA)
InventorsBrian P. Smith, Christopher Cook
Life of this patent
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Abstract
The device of according to the present invention is a device for holding a single crystal silicon seed. The device or holder contains a plurality of strips to clamp a seed crystal in the seed crystal holder; and a base supporting the plurality of strips. The plurality of strips each has a free end which contacts a single crystal silicon seed and an end opposite the free end which joins the base and becomes integral therewith. The plurality of strips are bent or folded in such that they exert pressure on a seed crystal when the seed crystal is inserted among the plurality of strips.
Claims9
A seed crystal holder comprising:
- a plurality of strips to clamp a seed crystal in the seed crystal holder;
- and
- a base supporting the plurality of strips.
A float zone apparatus comprising:
- a crystal growth chamber;
- a seed crystal holder further comprising:
- a plurality of strips to clamp a seed crystal in the seed crystal holder;
- and
- a base supporting the plurality of strips;
- a polycrystal holder that holds a polycrystalline silicon rod;
- an induction heating coil;
- and
- a rotating device for rotating the seed crystal holder and the polycrystal holder.
Dependencies are inferred from the claim text.