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US 9,406,487 B2Granted
Plasma enhanced chemical vapor deposition (PECVD) source
AssigneeSputtering Components, Inc.
InventorsDaniel Theodore Crowley, Patrick Lawrence Morse, William A. Meredith, Jr., John Robert German, Michelle Lynn Neal
Life of this patent
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Abstract
One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within the cavity. The magnetron assemblies are mutually electrically isolated from each other and from the body. In one implementation of such an embodiment, the self-contained magnetron assemblies comprise closed-drift magnetron assemblies. Other embodiments are disclosed.
Claims20
A plasma source comprising:
- a body in which a cavity is formed;
- and
- at least two self-contained magnetron assemblies disposed within the cavity;
- wherein the magnetron assemblies are mutually electrically isolated from each other and from the body.
1 more element
A method of sourcing plasma comprising:
- supplying a process gas to a cavity formed within a body of a plasma source, the plasma source comprising at least two self-contained magnetron assemblies disposed within the cavity, wherein the magnetron assemblies are mutually electrically isolated from each other and from the body;
- alternately biasing respective electrodes in the magnetron assemblies to have polarities opposite to one another;
- and
- directing the plasma substantially towards a substrate.
1 more element
A plasma source comprising:
- a body in which a cavity is formed;
- at least one self-contained magnetron assembly disposed within the cavity;
- at least two non-magnetron electrodes disposed within the cavity;
- and
- an alternating current (AC) power supply having an output coil;
- wherein the at least two non-magnetron electrodes are mutually electrically isolated from each other and from the body incorporating the cavity;
- and
- wherein the magnetron assembly is connected to a center tap of the output coil of the AC power supply and the non-magnetron electrodes are connected to end taps of the output coil of the AC power supply.
5 more elements
Dependencies are inferred from the claim text.