Linear high packing density for LED arrays
AssigneeApplied Materials, Inc.
InventorsJoseph Johnson, Joseph M. Ranish
Life of this patent
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Abstract
Apparatus for providing energy to a process chamber are provided herein. In one embodiment, the apparatus include a supporting substrate, a first plurality of solid state light sources disposed on a first surface of the supporting substrate, and a second plurality of solid state light sources disposed on the top surface of the supporting substrate, wherein the first and second plurality of solid state light sources are aligned and electrically isolated from each other, and the first plurality of solid state light sources is in physical contact with the second plurality of solid state light sources.
Claims20
An apparatus for providing radiant energy to a process chamber, the apparatus comprising:
- a supporting substrate;
- a first plurality of solid state light sources disposed on a first surface of the supporting substrate;
- and
- a second plurality of solid state light sources disposed on the first surface of the supporting substrate, wherein the first and second plurality of solid state light sources are aligned and each solid state light source in the first plurality of solid state light sources is not directly connected to any solid state light source in the second plurality of solid state light sources, and wherein voltage drop between a first solid state light source and a second solid state light source immediate adjacent the first solid state light source in the first plurality of solid state light sources and voltage drop between a third solid state light source and a fourth solid state light source immediate adjacent the third solid state light source in the second plurality of solid state light sources are equal, wherein the third and fourth solid state light sources are immediate adjacent the first and second solid state light sources, respectively.
An apparatus for providing radiant energy to a process chamber, the apparatus comprising:
- a supporting substrate;
- a first plurality of solid state light sources disposed on a first surface of the supporting substrate;
- and
- a second plurality of solid state light sources disposed on the first surface of the supporting substrate, wherein each solid state light source in the first plurality of solid state light sources is not directly connected to any solid state light source in the second plurality of solid state light sources, and voltage potential differences between each solid state light source in the first plurality of solid state light sources and the solid state light source in the second plurality of solid state light sources immediate adjacent each solid state light source in the first plurality of solid state light sources is less than an arcing potential, and the first and second plurality of solid state light sources are aligned and separated from each other by a minimum distance of 0 mm to about 1 mm.
An apparatus for providing energy to a process chamber, the apparatus comprising:
- a supporting substrate;
- and
- a plurality of strings of solid state light sources disposed parallel to each other on a first surface of the supporting substrate, wherein each string of solid state light sources is in a straight line configuration and has a plurality of light emitting elements electrically coupled in series, and voltage drops in each string of solid light sources and the immediate adjacent string of solid light sources are equal, and wherein each light emitting element in each string of solid light sources is not directly connected to any light emitting element in the immediate adjacent string of solid state light sources, and wherein each light emitting element in each string of solid state light sources has the same voltage rating as the immediate adjacent light emitting element in the immediate adjacent string of solid state light sources.
Dependencies are inferred from the claim text.