Apparatus for substrate treatment and heating apparatus
AssigneeAp Systems Inc.
InventorsIl-Hwan Lim, Jang-Woo Shim, Chul-Soo Kim, Seung-Ae Choi
Life of this patent
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Abstract
The present invention relates to an apparatus for heat-treating a substrate, and more particularly to an apparatus for substrate treatment to perform a heat treatment of a substrate for a flat panel display panel. An apparatus for substrate treatment according to an embodiment of the present invention comprises a processing chamber having a substrate treatment space; a heating housing having a heating lamp that emits radiant energy and a reflecting block that reflects radiant energy emitted from the heating lamp; and a window that maintains a sealing between the processing chamber and the heating housing and transmits the radiant energy to a substrate.
Claims27
An apparatus for substrate treatment comprising
- a processing chamber having a substrate treatment space for a substrate to be situated and subject to heat treatment;
- a heating housing having a heating lamp that emits radiant energy and a reflecting block that reflects radiant energy emitted from the heating lamp, wherein the reflecting block has an inclined surface at a side facing the substrate and a distance between the inclined surface of the heating reflecting block and the substrate decreases in a direction that the heating reflecting block is apart from the heating lamp, and wherein the heating lamp is disposed such that the radiant energy is transferred to the inclined surface of the reflecting block and reflected to the substrate;
- and
- a window that maintains a sealing between the processing chamber and the heating housing and transmits the radiant energy to the substrate.
An apparatus for substrate treatment comprising
- a processing chamber having a substrate treatment space;
- a heating housing having a heating lamp that emits radiant energy and a reflecting block that reflects radiant energy emitted from the heating lamp;
- and
- a window diffusion plate that maintains a sealing between the processing chamber and the heating housing, wherein the window diffusion plate has a plurality of through-holes and each of the plurality of through-holes has a unit window through which the radiant energy passes and wherein each unit window is sealed to the window diffusion plate by a sealing means.
A heating apparatus comprising
- a heating lamp emitting radiant energy;
- a heating housing having a reflecting block that reflects radiant energy emitted from the heating lamp, wherein the reflecting block has an inclined surface at a side facing a substrate that is disposed in a processing chamber and a distance between the inclined surface of the heating reflecting block and the substrate decreases in a direction that the heating reflecting block is apart from the heating lamp, and wherein the heating lamp is disposed such that the radiant energy is transferred to the inclined surface of the reflecting block and reflected to the substrate;
- and
- a window that maintains a sealing between the heating housing and the processing chamber and transmits the radiant energy to the substrate.
A heating apparatus comprising
- a processing chamber having a substrate treatment space;
- a heating housing having a heating lamp that emits radiant energy and a reflecting block that reflects radiant energy emitted from the heating lamp;
- and
- a window diffusion plate that maintains a sealing between the processing chamber and the heating housing, wherein the window diffusion plate has a plurality of through-holes and each of the plurality of through-holes has a unit window through which the radiant energy passes and wherein each unit window is sealed to the window diffusion plate by a sealing means.
Dependencies are inferred from the claim text.