Device for guiding electromagnetic radiation into a projection exposure apparatus
AssigneeCarl Zeiss SMT GmbH
InventorAndras G. Major
Life of this patent
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Abstract
A device for guiding electromagnetic radiation into a projection exposure apparatus for semiconductor lithography includes an optical fiber and an actuator for the mechanical manipulation of a section of the fiber as a result of which a temporally averaged homogenization of an intensity profile of electromagnetic radiation emerging at an exit end of the fiber can be achieved. A projection exposure apparatus for semiconductor lithography is equipped with the abovementioned device.
Claims18
A device for guiding electromagnetic radiation into a projection exposure apparatus for semiconductor lithography, comprising:
- an individual optical fibre;
- and
- an actuator arranged for the mechanical manipulation of a section of the individual optical fibre such that a temporally averaged homogenization of an intensity profile of electromagnetic radiation emerging at an exit end of the individual optical fibre is achieved,
- wherein:
- the device is configured so that, during use of the device, the electromagnetic radiation emerging at the exit end of the individual optical fibre heats an optical element of the projection exposure apparatus without being imaged by the projection exposure apparatus;
- and
- the actuator is arranged to reversibly alter a diameter of the section of the individual optical fibre.
A device, comprising:
- an individual optical fibre;
- and
- an actuator configured to mechanically manipulate a section of the individual optical fibre so that, during use of the device, a temporally averaged homogenization of an intensity profile of electromagnetic radiation emerges at an exit end of the individual optical fibre,
- wherein:
- the device is configured so that, during use of the device, the electromagnetic radiation emerging at the exit end of the individual optical fibre:
- a) heats an optical element in a projection exposure apparatus;
- and b) is not imaged by the projection exposure apparatus;
- and
- the actuator is arranged to reversibly alter a diameter of the section of the individual optical fibre.
An apparatus, comprising:
- an optical element;
- and
- a device comprising:
- an individual optical fibre;
- and
- an actuator configured to mechanically manipulate a section of the individual optical fibre so that, during use of the device, a temporally averaged homogenization of an intensity profile of electromagnetic radiation emerges at an exit end of the individual optical fibre,
- wherein:
- the device is configured so that, during use of the device, the electromagnetic radiation emerging at the exit end of the individual optical fibre heats the optical element without being imaged by the apparatus;
- the actuator is arranged to reversibly alter a diameter of the section of the individual optical fibre;
- and
- the apparatus is a projection exposure apparatus.
Dependencies are inferred from the claim text.