Semiconductor constructions
AssigneeMicron Technology, Inc.
InventorsGurtej S. Sandhu, Kirk D. Prall
Life of this patent
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AssigneeMicron Technology, Inc.
InventorsGurtej S. Sandhu, Kirk D. Prall
Estimating the term…
Some embodiments include methods of forming flash memory cells and semiconductor constructions, and some embodiments include semiconductor constructions. Some embodiments may include a method in which a semiconductor substrate is provided to have a plurality of active area locations. Floating gates are formed over the active area locations, with the floating gates having widths that are entirely sub-lithographic. Adjacent floating gates are spaced from one another by gaps. Dielectric material and control gate material are formed over the floating gates and within the gaps. Some embodiments may include a construction in which a pair of adjacent floating gates are over a pair of adjacent active areas, with the floating gates being spaced from one another by a distance which is greater than a distance that the active areas are spaced from one another.
A pair of adjacent non-volatile memory cells comprising active areas separated by an isolation region, and floating gates over the active areas, the floating gates being shaped as vertically-extending pillars having a vertical height that is greater than a width of the pillars and being spaced from one another by a greater distance than the active areas are spaced from one another;
A semiconductor construction, comprising:
A semiconductor construction, comprising:
A semiconductor construction, comprising:
Dependencies are inferred from the claim text.