Screen-printing stencil having amorphous carbon films and manufacturing method therefor

A screen printing mask comprising;

• a mask substrate directly attached to a frame body or indirectly attached through a mesh, the mask substrate having a through-hole;
• an amorphous carbon film formed on at least part of an inner wall of the through-hole and comprised of at least one element selected from the group consisting of silicon, oxygen, nitrogen, and mixtures thereof;
• and
• a thin film of a fluorine-containing silane coupling agent formed on at least part of the amorphous carbon film.

A screen printing mask comprising:

• a mesh fixed to a frame body;
• a mask substrate attached to one surface of the mesh and having a through-hole;
• an amorphous carbon film formed on at least part of an inner wall of the through-hole and comprised of at least one element selected from the group consisting of silicon, oxygen, nitrogen, and mixtures thereof;
• and
• a thin film of a fluorine-containing silane coupling agent formed on at least part of the amorphous carbon film.

A method for manufacturing a screen printing plate, the method comprising:

• fixing a mesh to a frame body;
• filling up the mesh with an emulsion to form an emulsion layer;
• forming a through-hole in the emulsion layer at a position corresponding to a print pattern;
• forming an amorphous carbon film on at least part of an inner wall of the thorough-hole, the amorphous carbon film being comprised of at least one element selected from the group consisting of silicon, oxygen, nitrogen, and mixtures thereof;
• and
• forming a thin film of a fluorine-containing silane coupling agent on at least part of the amorphous carbon film.

A method for manufacturing a screen printing mask, the method comprising:

• directly fixing a mask substrate to a frame body or indirectly fixing the mask substrate through a mesh, wherein the mask substrate is formed from a metallic plate and;
• forming a through-hole in the metallic plate at a position corresponding to a print pattern;
• forming an amorphous carbon film on at least part of an inner wall of the thorough-hole, the amorphous carbon film being comprised of at least one element selected from the group consisting of silicon, oxygen, nitrogen, and mixtures thereof;
• and
• forming a thin film of a fluorine-containing silane coupling agent on at least part of the amorphous carbon film.

A method for manufacturing a screen printing mask, the method comprising:

• fixing a mesh to a frame body;
• attaching a mask substrate to one surface of the mesh, the mask substrate having a through-hole;
• forming an amorphous carbon film on at least part of an inner wall of the thorough-hole, the amorphous carbon film being comprised of at least one element selected from the group consisting of silicon, oxygen, nitrogen, and mixtures thereof;
• and
• forming a thin film of a fluorine-containing silane coupling agent on at least part of the amorphous carbon film.