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US 9,178,032 B2Granted
Gas sensor and manufacturing method thereof
AssigneeElectronics and Telecommunications Research Institute
InventorsYoung-Jun Yu, Hongkyw Choi, Jin Sik Choi, Kwang Hyo Chung, Jin Tae Kim, Doo Hyeb Youn, Choon Gi Choi
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Abstract
Provided is a gas sensor including a substrate, a sensing electrode extended in a first direction on the substrate, and a plurality of heaters disposed in a second direction crossing the first direction on the substrate. The plurality of heaters is separated at both sides of the sensing electrode. The plurality of heaters includes graphene.
Claims20
A manufacturing method of a gas sensor, the method comprising:
- forming a substrate;
- forming a sensing electrode in a first direction on the substrate;
- and
- forming a plurality of heaters on the substrate in a second direction crossing the first direction at both sides of the sensing electrode,
- wherein:
- the sensing electrode is combined with materials to be sensed of a gas;
- the plurality of heaters are electrically insulated from the sensing electrode;
- and
- the plurality of heaters comprise graphene.
6 more elements
A manufacturing method of a gas sensor, the method comprising:
- forming a substrate;
- forming a sensing electrode on the substrate;
- forming an upper insulating layer on the sensing electrode and the substrate;
- forming an upper heater layer on the upper insulating layer;
- and
- patterning the upper heater layer and the upper insulating layer to form upper insulating patterns and upper heaters at both side end portions of the sensing electrode,
- wherein:
- the substrate, the sensing electrode, the upper insulating patterns and the upper heaters are stacked in this order;
- the sensing electrode is combined with materials to be sensed of a gas;
- the upper heaters are electrically insulated from the sensing electrode;
- and
- the upper heaters comprise graphene.
9 more elements
Dependencies are inferred from the claim text.