Metal-insulator-metal capacitor with current leakage protection
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuo-Ji Chen, Wen-Chuan Chiang, Huey-Chi Chu, Ming-Hsiang Song, Chen-Jong Wang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuo-Ji Chen, Wen-Chuan Chiang, Huey-Chi Chu, Ming-Hsiang Song, Chen-Jong Wang
Estimating the term…
Methods and apparatus are disclosed for manufacturing metal-insulator-metal (MIM) capacitors. The MIM capacitors may comprise an electrode, which may be a top or bottom electrode, which has a bottle neck. The MIM capacitors may comprise an electrode, which may be a top or bottom electrode, in contact with a sidewall of a via. The sidewall contact or the bottle neck of the electrode may burn out to form a high impedance path when the leakage current exceeds a specification, while the sidewall contact or the bottle neck of the electrode has no impact for normal MIM operations. The MIM capacitors may be used as decoupling capacitors.
A metal insulator metal (MIM) capacitor, comprising:
An metal insulator metal (MIM) capacitor comprising:
A metal insulator metal (MIM) capacitor comprising:
Dependencies are inferred from the claim text.