Ceramic member and member for semiconductor manufacturing equipment

Abstract

A member 20 for semiconductor manufacturing equipment includes a base portion 22 and a ceramic member 30 formed on the base portion 22. The ceramic member 30 of the present invention includes a ceramic base 32 containing at least one of magnesium oxide, a magnesium oxide solid solution in which a predetermined component is dissolved in magnesium oxide, and zirconium oxide; and an electrode 34 which is arranged on part of the ceramic base 32 and which contains a ruthenium-aluminum alloy as an electrode component. The ceramic member 30 is a plate-like member and has a structure in which the electrode 34 is embedded therein. The electrode 34 is connected to a feeding member 26 inserted from the underside of the ceramic member 30. Electric power is supplied from the feeding member 26.

Dependencies are inferred from the claim text.