Method and arrangement for displacement
AssigneeHeidelberg Instruments Mikrotechnik GmbH
InventorsMichael Fangerau, Alexander Mangold, Roland Kaplan
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AssigneeHeidelberg Instruments Mikrotechnik GmbH
InventorsMichael Fangerau, Alexander Mangold, Roland Kaplan
Estimating the term…
A method and apparatus operable for displacing an image, which is transmitted by electromagnetic radiation, perpendicular to the direction of radiation by use of a rotatably disposed radiation-refracting body, located in the path of an imaging beam, having a refractive index that differs from the surrounding medium with regard to the radiation used. The method allows for precise image displacement. The rotation of the radiation-refracting body causing the displacement is measured, and the change of the optical path length caused by the angular change in a further electromagnetic beam utilized for the measurement is determined by evaluating the superimposition of the radiation reflected by a planar reflecting surface with the incident electromagnetic radiation. Part of the electromagnetic measurement beam, which is reflected on the surface of the radiation-refracting body, strikes a measurement unit, which supplies an electrical signal as a function of the incident position of the electromagnetic radiation.
A method of displacing an image, where the image is being transferred using electromagnetic radiation of a reproduction beam having a beam direction, the image being displaced perpendicular to the beam direction by use of a rotatably arranged radiation-refracting body that is disposed in a course of the reproduction beam and that has a refraction index different from an ambient medium with respect to said radiation, wherein the radiation-refracting body comprises at least one of either a plane parallel medium or a glass plate, the method comprising:
An arrangement for displacing an image using electromagnetic radiation of a reproduction beam having a beam direction, the image being displaced perpendicular to the beam direction by use of a rotatably arranged radiation-refracting body that is disposed in a course of the reproduction beam and that has a refraction index different from an ambient medium with respect to the radiation, wherein the radiation-refracting body comprises at least one of either a plane parallel medium or a glass plate, the arrangement comprising:
Dependencies are inferred from the claim text.