System for separately handling different size FOUPs
AssigneeGlobalfoundries Inc.
InventorsWilliam J. Fosnight, Ryan J. Gallagher, Stephen B. Miner
Life of this patent
Estimating the term…
Abstract
A system for separately handling different size FOUPs includes an end effector having a surface thereon for supporting a FOUP. The end effector and surface is configured to support different size FOUPs. A fixture or means for engaging and maintaining a FOUP, of different size FOUPs, included to position and maintain each of a different size FOUP on the end effector during transport thereof. A shelf is configured to receive each of said different size FOUPs. The end effector is thus capable of transporting either a first size FOUP or a second, smaller size FOUP.
Claims16
An apparatus for separately handling different size FOUPs comprising:
- an end effector having a surface thereon for supporting a FOUP, said end effector and surface being configured to separately support different size FOUPs, each FOUP sized to accommodate a different size substrate;
- a fixture coupled to the surface of said end effector, said fixture configured to engage each of said different size FOUPs and maintain each of said different size FOUPs in position on said end effector during transport thereof;
- and
- a shelf configured to receive each of said different size FOUPs, wherein said shelf comprises a receiving area configured to receive said end effector therein such that each of said different size FOUPs is properly positioned on said shelf.
A method of separately handling different size FOUPs comprising:
- supporting a FOUP on a surface of an end effector, said end effector and surface being configured to separately support different size FOUPs, each FOUP sized to accommodate a different size substrate;
- engaging each of said different size FOUPs using a fixture coupled to the surface of said end effector;
- maintaining each of said different size FOUPs in position on said end effector during transport thereof;
- and
- using a shelf configured to receive each of said different size FOUPs, wherein said shelf comprises a receiving area configured to receive said end effector therein such that each of said different size FOUPs is properly positioned on said shelf.
An apparatus for separately handling different size FOUPs comprising:
- an end effector having a surface thereon for supporting a FOUP, said end effector and surface being configured to separately support different size FOUPs, each FOUP sized to accommodate a different size substrate;
- means for engaging and maintaining each of said different size FOUPs in position on said end effector during transport thereof;
- and
- a shelf configured to receive each of said different size FOUPs, wherein said shelf comprises a receiving area configured to receive said end effector therein such that each of said different size FOUPs is properly positioned on said shelf.
Dependencies are inferred from the claim text.