US 9,136,301 B2 · Multi-wave band light sensor combined with function of IR sensing and method of fabricating the same

Abstract

Provided is a multi-wave band light sensor combined with a function of infrared ray (IR) sensing including a substrate, an IR sensing structure, a dielectric layer, and a multi-wave band light sensing structure. The substrate includes a first region and a second region. The IR sensing structure is in the substrate for sensing IR. The dielectric layer is on the IR sensing structure. The multi-wave band light sensing structure includes a first wave band light sensor, a second wave band light sensor, and a third wave band light sensor. The second wave band light sensor and the first wave band light sensor are overlapped and disposed on the IR sensing structure on the first region of the substrate from the bottom up. The third wave band light sensor is in the dielectric layer of the second region.

Claims21

Dependent claims

A multi-wave band light sensor combined with a function of infrared ray (IR) sensing, comprising:

a substrate comprising a first region and a second region;
an IR sensing structure in the substrate for sensing IR;
a dielectric layer on the substrate and covering the IR sensing structure;
and
a multi-wave band light sensing structure on the substrate, comprising:
a first wave band light sensor on the dielectric layer of the first region and corresponding to the IR sensing structure;
a second wave band light sensor in the dielectric layer of the first region, wherein a first portion of the second wave band light sensor is overlapped with the IR sensing structure and the first wave band light sensor;
and
a third wave band light sensor in the dielectric layer of the second region.

6 more elements

A method of fabricating a multi-wave band light sensor combined with a function of IR sensing, comprising:

forming an IR sensing structure in a first region of a substrate for sensing IR;
forming a dielectric layer on the substrate;
and
forming a multi-wave band light sensing structure, comprising:
forming a first wave band light sensor on the dielectric layer of the first region of the substrate;
and
forming a second wave band light sensor in the dielectric layer of the first region of the substrate and forming a third wave band light sensor in the dielectric layer of a second region of the substrate, wherein a first portion of the second wave band light sensor is overlapped with the IR sensing structure and the first wave band light sensor.

4 more elements

Dependencies are inferred from the claim text.

Multi-wave band light sensor combined with function of IR sensing and method of fabricating the same

Life of this patent

Multi-wave band light sensor combined with function of IR sensing and method of fabricating the same

Life of this patent

Abstract

Claims21