Thermal processing apparatus and cooling method

A thermal processing apparatus configured to thermally process a plurality of objects to be processed, the thermal processing apparatus comprising:

• a processing vessel;
• a support unit capable of being moved to be loaded into and unloaded from the processing vessel, while supporting the plurality of objects to be processed;
• a heating furnace disposed outside the processing vessel to surround the processing vessel, with a cooling space through which a gas can pass being defined between the heating furnace and the processing vessel;
• a cooling-gas introduction unit disposed on the heating furnace, the cooling-gas introduction unit including a blowing fan and a gas introduction passage, for introducing a cooling gas for cooling the processing vessel into the cooling space;
• a cooling-gas discharge unit disposed on the heating furnace, the cooling-gas discharge unit including a gas discharge passage, a heat exchanger, and a suction fan, for discharging the cooling gas of a raised temperature from the cooling space;
• and
• a bypass unit, including a bypass passage, configured to communicate the gas introduction passage and the gas discharge passage so as to bypass a part of the cooling gas,
• wherein the gas discharge passage extends outside from the heating furnace to the heat exchanger, and
• a mixer is disposed on a connection position of the gas discharge passage between the heating furnace and the heat exchanger, at which gases in the gas discharge passage and the bypass passage are mixed with each other.

A method of cooling a thermal processing apparatus configured to thermally process a plurality of objects to be processed, the method comprising:

• introducing a cooling gas into a cooling space of a predetermined width defined between a cylindrical processing vessel containing the objects to be processed and a heating furnace, the heating furnace being disposed to surround an outer peripheral side of the processing vessel for heating the objects to be processed, so as to cool the processing vessel, while discharging the cooling gas of a raised temperature;
• and
• introducing a temperature-lowering gas into the cooling gas of a raised temperature, which has been discharged from the cooling space, so as to mix the gases with each other, whereby a temperature of the mixed gas becomes a predetermined temperature or less,
• the thermal processing apparatus comprising:
• the processing vessel;
• a support unit capable of being moved to be loaded into and unloaded from the processing vessel, while supporting the plurality of objects to be processed;
• the heating furnace disposed outside the processing vessel to surround the processing vessel, with the cooling space through which gas can pass, being defined between the heating furnace and the processing vessel;
• a cooling-gas introduction unit disposed on the heating furnace, the cooling-gas introduction unit including a blowing fan and a gas introduction passage, for introducing the cooling gas for cooling the processing vessel into the cooling space;
• a cooling-gas discharge unit disposed on the heating furnace, the cooling-gas discharge unit including a gas discharge passage, a heat exchanger, and a suction fan, for discharging the cooling gas of a raised temperature from the cooling space;
• and
• a temperature-lowering gas introduction unit disposed between the cooling space and the heat exchanger,
• wherein the gas discharge passage extends outside from the heating furnace to the heat exchanger, and
• a mixer is disposed on a connection position of the gas discharge passage between the heating furnace and the heat exchanger, at which the gas discharge passage and the temperature-lowering-gas introduction passage are connected to each other, and the temperature-lowering gas and the cooling gas are mixed with each other.

A method of cooling a thermal processing apparatus configured to thermally process a plurality of objects to be processed, the method comprising:

• introducing a cooling gas into a cooling space of a predetermined width defined between a cylindrical processing vessel containing the objects to be processed and a heating furnace disposed to surround an outer peripheral side of the processing vessel for heating the objects to be processed, so as to cool the processing vessel, while discharging the cooling gas of a raised temperature;
• and
• bypassing a part of the cooling gas flowing toward the cooling space and introducing the bypassed cooling gas into the cooling gas of a raised temperature, which has been discharged from the cooling space, so as to mix the gases with each other, whereby a temperature of the mixed gas becomes a predetermined temperature or less,
• the thermal processing apparatus comprising:
• the processing vessel;
• a support unit capable of being moved to be loaded into and unloaded from the processing vessel, while supporting the plurality of objects to be processed;
• the heating furnace disposed outside the processing vessel to surround the processing vessel, with the cooling space through which gas can pass being defined between the heating furnace and the processing vessel;
• a cooling-gas introduction unit disposed on the heating furnace, the cooling-gas introduction unit including a blowing fan and a gas introduction passage, for introducing the cooling gas for cooling the processing vessel into the cooling space;
• a cooling-gas discharge unit disposed on the heating furnace, the cooling-gas discharge unit including a gas discharge passage, a heat exchanger, and a suction fan, for discharging the cooling gas of a raised temperature from the cooling space;
• and
• a bypass unit, including a bypass passage, configured to communicate the gas introduction passage and the gas discharge passage so as to bypass a part of the cooling gas,
• wherein the gas discharge passage extends outside from the heating furnace to the heat exchanger, and
• a mixer is disposed on a connection position of the gas discharge passage between the heating furnace and the heat exchanger, at which gases in the gas discharge passage and the bypass passage are mixed with each other.