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US 9,069,258 B2Granted
Mask having assist pattern
AssigneeSamsung Display Co., Ltd.
InventorsBong-Yeon Kim, Min Kang, Seung-Bo Shim, Jong-kwang Lee, Jin-Ho Ju, Jeong-Won Kim, Tae-Gyun Kim, Chul-Won Park, Jun-Hyuk Woo, Hyun-Joo Lee
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Abstract
A mask may include a circuit area and a pixel area. The circuit area includes a circuit pattern. The pixel area includes a pixel pattern which is extended in a length direction and an assist pattern which is at an end portion of the pixel pattern and adjacent to the circuit area.
Claims12
A mask comprising:
- a circuit area comprising a circuit pattern;
- and
- a pixel area comprising:
- a pixel pattern extended in a length direction;
- and
- an assist pattern adjacent to the circuit area, the assist pattern connected to and extended from an end portion of the pixel pattern,
- wherein
- the assist pattern connected to and extended from the end portion of the pixel pattern comprises two sub-assist patterns extended from corners of the end portion of the pixel pattern, each of the sub-assist patterns having a square shape.
5 more elements
Dependencies are inferred from the claim text.