Tunable filter structures and design structures

A method of forming a filter structure, comprising:

• forming a piezoelectric resonance filter over a cavity structure, wherein the forming comprises:
• forming an upper electrode on one side of a piezoelectric material;
• and
• forming a lower electrode on an opposing side of the piezoelectric material;
• and
• forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter,
• wherein forming of the MEMS cantilever beam comprises forming a comb structure over the piezoelectric resonance filter,
• wherein forming of the comb structure comprises forming a high resistive region on a plurality of fingers of the comb structure, and
• wherein the high resistive region is formed of a different material than remaining portions of the comb structure.

A method of forming a filter structure, comprising:

• forming a piezoelectric resonance filter over a cavity structure, wherein the forming comprises:
• forming an upper electrode on one side of a piezoelectric material;
• and
• forming a lower electrode on an opposing side of the piezoelectric material;
• and
• forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter, wherein
• forming of the MEMS cantilever beam comprises forming a comb structure over the piezoelectric resonance filter, and
• forming of the comb structure comprises at least one of forming fingers of different materials and fingers of different lengths.

A filter structure, comprising:

• a piezoelectric resonance filter formed over a cavity structure, wherein the piezoelectric resonance filter comprises:
• an upper electrode on one side of a piezoelectric material;
• and
• a lower electrode on an opposing side of the piezoelectric material;
• a micro-electro-mechanical structure (MEMS) cantilever beam fixed on one end to an insulator material and suspended over the piezoelectric resonance filter at a location in which, upon actuation, makes contact with the piezoelectric resonance filter, wherein
• the MEMS cantilever beam comprises a comb structure,
• the comb structure comprises a high resistive region on a plurality of fingers of the comb structure, and
• the high resistive region is formed of a different material than remaining portions of the comb structure.

A filter structure, comprising:

• a piezoelectric resonance filter formed over a cavity structure, wherein the piezoelectric resonance filter comprises:
• an upper electrode on one side of a piezoelectric material;
• and
• a lower electrode on an opposing side of the piezoelectric material;
• a micro-electro-mechanical structure (MEMS) cantilever beam fixed on one end to an insulator material and suspended over the piezoelectric resonance filter at a location in which, upon actuation, makes contact with the piezoelectric resonance filter;
• the MEMS cantilever beam comprises a comb structure, and
• an electrode in an insulator material, below the cavity and structured to apply an effective load to the MEMS cantilever beam.

A filter structure, comprising:

• a piezoelectric resonance filter formed over a cavity structure, wherein the piezoelectric resonance filter comprises:
• an upper electrode on one side of a piezoelectric material;
• and
• a lower electrode on an opposing side of the piezoelectric material;
• and
• a micro-electro-mechanical structure (MEMS) cantilever beam fixed on one end to an insulator material and suspended over the piezoelectric resonance filter at a location in which, upon actuation, makes contact with the piezoelectric resonance filter,
• wherein the MEMS cantilever beam comprises a comb structure and the comb structure includes fingers of different lengths.

A filter structure, comprising:

• a piezoelectric resonance filter formed over a cavity structure, wherein the piezoelectric resonance filter comprises:
• an upper electrode on one side of a piezoelectric material;
• and
• a lower electrode on an opposing side of the piezoelectric material;
• and
• a micro-electro-mechanical structure (MEMS) cantilever beam fixed on one end to an insulator material and suspended over the piezoelectric resonance filter at a location in which, upon actuation, makes contact with the piezoelectric resonance filter,
• wherein the MEMS cantilever beam comprises a comb structure and the comb structure includes fingers of different materials.