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US 9,049,806 B2Granted
Integrated device and manufacturing method
AssigneeCitizen Holdings Co., Ltd.
InventorsMasafumi Ide, Toru Takizawa, Kaoru Yoda
Life of this patent
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Abstract
An integrated device includes an optical element and an electrical element that are implemented on a substrate. The optical element and the electrical element are bonded by surface-activated bonding technology to a bonding portion that is formed on the substrate and made of metal material.
Claims8
An integrated device in which an optical element and an electrical element are implemented on a substrate and a plurality of laser diodes, a plurality of wavelength multiplexers, and a plurality of 90° pitch converters are arranged on the substrate, wherein
- materials of the optical element and the electrical element have different coefficients of thermal expansion from each other,
- the optical element and the electrical element are bonded by surface-activated bonding technology to a bonding portion that is formed on the substrate and made of metal material, a bonding state of the bonding portion bonded by the surface-activated bonding technology is reinforced by resin,
- a waveguide is formed on the substrate and connected to the optical element directly,
- an interval between the plurality of wavelength multiplexers is small compared to an interval among the plurality of laser diodes, and
- the plurality of 90° pitch converters are provided at corners, formed by inputs to the plurality of wavelength multiplexers and waveguides for connecting the plurality of laser diodes, to align a pitch of the waveguides on a side of the plurality of laser diodes with that on a side of plurality of wavelength multiplexers.
2 more elements
Dependencies are inferred from the claim text.