Organic image sensor and method of producing the same
AssigneeFUJIFILM Corporation
InventorShinji Imai
Life of this patent
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Abstract
Pixel electrodes have end portions inclined at inclination angles α, where 30°≦α≦85°, relative to a substrate surface of a substrate. An organic layer disposed on the pixel electrodes is formed by vapor deposition using deposition beams that enter the substrate surface at incident angles θ smaller than 90°−αmax, where αmax is the maximum inclination angle among the inclination angles of the end portions of the pixel electrodes, under a deposition substrate temperature condition lower than the glass transition temperature of the organic layer.
Claims2
An organic image sensor having a plurality of pixel portions on a substrate, the organic image sensor comprising:
- a plurality of pixel electrodes arranged apart from one another on the substrate and corresponding in number to the number of the pixel portions;
- an organic layer disposed in the form of a continuous film on and between the pixel electrodes, the organic layer including a photoelectric conversion layer shared by the plurality of pixel portions;
- and
- a counter electrode disposed on the organic layer and shared by the plurality of pixel portions,
- wherein the pixel electrodes have end portions inclined at inclination angles α, where 30°≦α≦85°, relative to a substrate surface of the substrate, and
- the organic layer is a film formed by vapor deposition using deposition beams that enter the substrate surface at incident angles smaller than 90°−αmax, where αmax is a maximum inclination angle among the inclination angles of the end portions of the pixel electrodes, under a deposition substrate temperature condition lower than a glass transition temperature of the organic layer.
A method of producing an organic image sensor having a plurality of pixel portions on a substrate, the organic image sensor including a plurality of pixel electrodes arranged apart from one another on the substrate, an organic layer disposed in the form of a continuous film on and between the pixel electrodes, the organic layer including a photoelectric conversion layer shared by the plurality of pixel portions, and a counter electrode disposed on the organic layer and shared by the plurality of pixel portions, the method comprising the steps of:
- forming, as the electrodes on the substrate, a plurality of pixel electrodes having end portions inclined at inclination angles α, where 30°≦α≦85°, relative to a substrate surface of the substrate;
- and
- forming an organic layer including a photoelectric conversion layer that generates electric charges depending on received light above the pixel electrodes by vapor deposition using deposition beams that enter the substrate surface at incident angles smaller than 90°−αmax, where αmax is a maximum inclination angle among the inclination angles of the end portions of the pixel electrodes, under a deposition substrate temperature condition lower than a glass transition temperature of the organic layer.
Dependencies are inferred from the claim text.