Membrane supports with reinforcement features
AssigneeProtochips, Inc.
InventorsJohn Damiano, Jr., Stephen E. Mick, David P. Nackashi
Life of this patent
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Abstract
A sample support structure with integrated support features and methods of making and using the reinforced membrane. The sample support structures are useful for supporting samples for analysis using microscopic techniques, such as electron microscopy, optical microscopy, x-ray microscopy, UV-VIS spectroscopy and nuclear magnetic resonance (NMR) techniques.
Claims17
A reinforced sample support structure comprising (a) an array comprising more than one viewing region, wherein the viewing regions are supported by and divided by reinforcement regions, and the reinforcement regions and the viewing regions consist of the same material, the reinforcement regions are thicker than the viewing regions, and the viewing regions are electron transparent, and (b) a framing region surrounding the array, wherein the framing region runs substantially along an outer edge of the reinforced sample support structure, wherein the reinforcement regions are positioned above the viewing regions and the framing region is positioned below the viewing regions.
A method of making a reinforced sample support structure, the sample support structure comprising (a) an array comprising more than one viewing region, wherein the viewing regions are supported by and divided by reinforcement regions and (b) a framing region surrounding the array, wherein the reinforcement regions and the viewing regions consist of the same material, said method comprising the following steps:
- providing a substrate having a first surface and a second surface;
- depositing a first support layer on the first surface of the substrate;
- depositing a second support layer on the second surface of the substrate;
- removing a portion of the first support layer to expose the substrate;
- removing a portion of the substrate to yield the framing region;
- thinning at least one region of the second support layer to provide the array comprising viewing regions supported by and divided by reinforcement regions, the reinforcement regions are thicker than the viewing regions, and wherein the reinforcement regions are positioned above the viewing regions and the framing region is positioned below the viewing regions,
- wherein the framing region runs substantially along an outer edge of the reinforced sample support structure.
Dependencies are inferred from the claim text.