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US 9,040,935 B2Granted
Blanking apparatus, drawing apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorsTomoyuki Morita, Masato Muraki
Life of this patent
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Abstract
The present invention provides a blanking apparatus comprising a plurality of blankers configured to respectively blank a plurality of beams with respect to a target position on an object, and a driving device configured to drive the plurality of blankers, wherein the driving device includes a change device configured to change relation between a combination of beams of the plurality of beams, and a target dose.
Claims11
A blanking apparatus comprising:
- a plurality of blankers configured to respectively and selectively blank a plurality of beams with respect to a target position on an object;
- and
- a driving device configured to drive the plurality of blankers,
- wherein the driving device includes a change device configured to change a relation between a combination of beams, not to be blanked with respect to the target position, of the plurality of beams, and a target dose.
1 more element
A drawing apparatus which performs drawing on a substrate, the apparatus comprising:
- an irradiation device configured to irradiate the substrate with a plurality of beams;
- and
- a stage configured to hold the substrate and to be movable,
- wherein the irradiation device includes a blanking apparatus comprising:
- a plurality of blankers configured to respectively and selectively blank a plurality of beams with respect to a target position on an object;
- and
- a driving device configured to drive the plurality of blankers,
- wherein the driving device includes a change device configured to change a relation between a combination of beams, not to be blanked with respect to the target position, of the plurality of beams, and a target dose.
5 more elements
A method of manufacturing an article, the method comprising steps of:
- performing drawing on a substrate using a drawing apparatus;
- developing the substrate on which the drawing has been performed;
- and
- processing the developed substrate to manufacture the article,
- wherein the drawing apparatus performs drawing on the substrate, and includes:
- an irradiation device configured to irradiate the substrate with a plurality of beams;
- and
- a stage configured to hold the substrate and to be movable,
- wherein the irradiation device includes a blanking apparatus, the blanking apparatus including:
- a plurality of blankers configured to respectively and selectively blank a plurality of beams with respect to a target position on the substrate;
- and
- a driving device configured to drive the plurality of blankers,
- wherein the driving device includes a change device configured to change a relation between a combination of beams, not to be blanked with respect to the target position, of the plurality of beams, and a target dose.
10 more elements
Dependencies are inferred from the claim text.